Patent holdings for IPC class H01J 37/10

Total number of patents in this class: 303

10-year publication summary

29
22
24
29
38
36
35
31
18
8
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
4424
40
ASML Netherlands B.V.
6816
37
Carl Zeiss Microscopy GmbH
1146
27
NuFlare Technology, Inc.
770
21
JEOL Ltd.
556
20
FEI Company
851
15
KLA-Tencor Corporation
2574
13
Applied Materials Israel, Ltd.
549
11
Carl Zeiss MultiSEM GmbH
85
11
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
149
10
KLA Corporation
1223
10
Hitachi High-Technologies Corporation
2034
6
Hitachi High-Tech Science Corporation
326
6
Varian Semiconductor Equipment Associates, Inc.
1282
6
Taiwan Semiconductor Manufacturing Company, Ltd.
36809
5
Technische Universiteit Delft
646
5
Purdue Research Foundation
3277
4
Hermes Microvision Incorporated B.V.
129
4
Ebara Corporation
1951
3
Hermes Microvision, Inc.
25
3
Other owners 46